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  • 1
    Electronic Resource
    Electronic Resource
    Electron temperature control with grid bias in inductively coupled argon plasma (1999)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 6 (1999), S. 1017-1028 
    Details
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The mechanism of controlling electron temperature with grid-biased voltage is studied experimentally and the relevant physics is discussed in an inductively coupled Ar discharge. To obtain the electron density and electron temperature, the electron energy distribution functions (EEDFs) are measured with a Langmuir probe. As the grid voltage decreases negatively, the effective electron temperature is controlled from 2.0 to 0.6 eV and the electron density changes from 3×1010 to 2×1010 cm−3 in the diffusion region, while the effective electron temperature and electron density are not changed in the source region. The dependence of such various parameters, as electron density, electron temperature, plasma potential in each region, and so on, on the applied voltage, is presented. The functional relations between the measured physical quantities are well explained based on a global particle and energy balance relations. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.873342
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  • 2
    Electronic Resource
    Electronic Resource
    A calibration method of a radio frequency magnetic probe (1999)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 70 (1999), S. 3774-3775 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: We demonstrate a simple calibration method of a rf magnetic probe by utilizing a two port network analysis method. The sensitivity (V/G) of the probe is determined by measuring the scattering parameters of S11 and S21. The magnetic field generated by the Helmholtz coil is calculated from S11 and the probe sensitivity is obtained from S21. The measured probe sensitivity is 0.1–0.6 V/G in the frequency range of 1–15 MHz. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1149951
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  • 3
    Electronic Resource
    Electronic Resource
    Angle chord integral inverter and a rotating type optical probe (1999)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 70 (1999), S. 1730-1734 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The inversion problem of angle dependent chord integrals is theoretically studied and a rotating type optical probe is developed for its application. The proposed solution is computationally efficient and robust to measurement additive noise. The probe system constructed is tested in an inductively coupled plasma source by measuring a spectral line intensity of argon plasma. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1149659
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    Paper (German National Licenses)
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  • 4
    Electronic Resource
    Electronic Resource
    Characteristics of electron cyclotron resonance plasmas for large area ion source application : Proceedings of the 7th international conference on ion sources (1998)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 69 (1998), S. 846-848 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The characteristics of electron cyclotron resonance (ECR) plasmas at the plug chamber of the "Hanbit" plasma facility have been investigated. The chamber length and diameter are 2.25 m and 1.5 m, respectively, and three pairs of solenoids are used to produce a variety of magnetic field configurations. Two magnetrons of 5 kW maximum output power each are used to produce the ECR plasma, and the microwaves are launched in extraordinary mode (X-mode) and/or right-hand circular polarized mode (R-mode). The dependence of the radial plasma density profile and the energy distribution of end loss ions upon the magnetic field strength and geometry, gas pressure, microwave power, and the mode of microwave are investigated. The plasma parameters are measured by using a position-controllable electrostatic probe, an x-ray spectrometer, and a multigrid ion energy analyzer. Transitions, occurred by threshold magnetron powers between low and high density modes, are found on certain conditions of magnetic field geometry and gas pressure. The density profile and the ion energy distribution are strong functions of magnetic field geometry and gas pressure, respectively. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1148579
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    Paper (German National Licenses)
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