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  • 1985-1989  (3)
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  • 1
    Electronic Resource
    Electronic Resource
    Kinetics of laser-induced chemical vapor deposition of gold (1987)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 62 (1987), S. 281-286 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Rates of photothermal gold deposition onto alumina substrates heated by a focused argon-ion laser beam were measured by determining the time required for deposits to grow through the focal spot of a HeNe laser probe beam directed parallel to the substrate. Deposition rates from 0.25 to 6 μm/s were measured for deposits with heights ranging from 5 to 100 μm. Rates of gold deposition using dimethyl gold hexafluoroacetylacetonate as a precursor depend linearly on the gold precursor partial pressure and for a wide variety of conditions do not depend on the laser power or focal spot diameter. A theory is presented to describe reactant mass transfer-controlled deposition with and without buffer gas. Comparison of measured with calculated growth rates showed that gold deposition rates using dimethyl gold hexafluoroacetylacetonate as a precursor were transport limited for the conditions studied. Theory and experiment also showed that the deposition rate decreases inversely with increasing buffer gas pressure above a critical pressure.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.339141
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Aerosol flow reactor production of fine Y1Ba2Cu3O7 powder: Fabrication of superconducting ceramics (1988)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 52 (1988), S. 1622-1624 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: An aerosol flow reactor operating at 900–1000 °C is used to prepare high-purity Y1Ba2Cu3O7 powders with a uniform chemical composition and a submicron to micron average particle size by thermally decomposing aerosol droplets of a solution consisting of the nitrate salts of Y, Ba, and Cu in a 1:2:3 ratio. The powders were at least 99% reacted based on thermogravimetric analysis, and the x-ray diffraction pattern is essentially that of Y1Ba2Cu3O7. Magnetic susceptibility measurements showed the powders to be superconducting with a transition at 90 K even for average reactor residence times as short as 20 s. Sintering cold-pressed pellets between 900 and 1000 °C provides dense, fine grained (average size on the order of 1 μm) superconducting ceramics with sharp 90 K transitions. The grain size and shape of a final sintered part could be varied depending on powder production, processing, and sintering conditions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.99703
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    LCVD of copper: Deposition rates and deposit shapes (1986)
    Springer
    Applied physics 40 (1986), S. 1-5 
    Details
    ISSN: 1432-0630
    Keywords: 81.15.Gh ; 82.30.Lp
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Laser chemical vapor deposition of copper has been performed under a variety of conditions. The results are interpreted using the kinetic model of Ehrlich and Tsao. We find that the kinetics of the process are limited by the rates of surface reactions and not by diffusion of reactant molecules to the surface. Furthermore, we find that deposit shapes are quite sensitive to laser intensity and scan rate.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00616584
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    Paper (German National Licenses)
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