ISSN:
1572-9605
Keywords:
Chemical vapor deposition
;
YBa2Cu3O7−x
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
Abstract The deposition of the condensed phase YBa2Cu3O7−x from a gas mixture composed of YCl3, BaCl2, Cu3Cl3, and Ar reacting with another consisting of O2 and Ar in a flow system at elevated temperatures was investigated by means of the virtual equilibrium model, and the deposition rates were computed as a function of input gas stream compositions. The optimum growth conditions were identified.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00618526
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