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Chemical vapor deposition of the superconductor YBa2Cu3O7−x (s) from the gas phase (1989)

Rao, Y. K. ; Kim, S. S.

Springer

Journal of superconductivity 2 (1989), S. 395-407

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ISSN: 1572-9605

Keywords: Chemical vapor deposition ; YBa2Cu3O7−x

Source: Springer Online Journal Archives 1860-2000

Topics: Electrical Engineering, Measurement and Control Technology , Physics

Notes: Abstract The deposition of the condensed phase YBa2Cu3O7−x from a gas mixture composed of YCl3, BaCl2, Cu3Cl3, and Ar reacting with another consisting of O2 and Ar in a flow system at elevated temperatures was investigated by means of the virtual equilibrium model, and the deposition rates were computed as a function of input gas stream compositions. The optimum growth conditions were identified.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF00618526

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