ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The thermalization of sputtered atoms in a magnetron discharge was investigated using laser-induced fluorescence. The results clearly indicated for the first time that the velocity distribution agrees well with the Thompson formula [M. W. Thompson, Philos. Mag. 18, 377 (1968)] for d/λ(very-much-less-than)1, while a thermalized component becomes appreciable for d/λ(approximately-greater-than)1, where d is the distance from the cathode surface and λ is the mean free path of sputtered atoms for collisions with filling gas atoms.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.104827
Permalink