ISSN:
1432-1858
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Technology
Notes:
Abstract This paper describes the micromachining program status of the micromachining laboratory at the SRRC. A preliminary LIGA process has been established. Many joint projects with local and foreign institutes to develop devices for domestic industries have been started. The interests in the application of the LIGA technology is continuously growing in Taiwan. Two-millimeter ultra-deep microstructures have been achieved.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s005420050083