ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The procedure for analyzing the discrimination of fundamental peaks in x-ray-diffraction measurements of strained-layer superlattice (SLS) structures is generalized and refined for application to more complex structures, including both lattice-relaxed and coherently strained layers. Two criteria are proposed for investigating lattice relaxation and coherent deformation of relevant layers. A ZnCdSe/ZnSe SLS grown on a GaAs substrate with a ZnSe buffer layer is structurally analyzed by the generalized procedure with the two criteria, demonstrating its effectiveness in analyzing such complex structures. It is revealed from this analysis that the ZnSe buffer layer is almost totally lattice relaxed relative to the GaAs substrate and that the ZnCdSe/ZnSe SLS layer is coherently strained relative to the relaxed ZnSe buffer layer. Quantitative analysis with a kinematical step model also confirms the above results in terms of peak position and peak intensity profile. The full width at half-maximum of the SLS peaks in the experimental profiles, however, is much broader than that of the calculated profiles. Based on this difference, some consideration of the peak broadening mechanism is offered from the viewpoint of broadening symmetry, revealing that this analysis works as a simple checking method on the peak broadening mechanism.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.357223
