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Cryogenically cooled multiple-substrate holder for high vacuum (1994)

Chaiken, A. ; Honea, E. C. ; Rupprecht, W. S. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 65 (1994), S. 3870-3870

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: A novel design is presented for a cryogenically cooled multisubstrate sample holder for thin film deposition in high vacuum. The cryogen flows through tubing soldered onto a fixed copper plate, while the substrates are mounted on a separate tray that is supported by a linear/rotary-motion feedthrough. By lowering the substrate tray into firm contact with the copper plate, substrate temperatures as low as 120 K can be achieved. © 1994 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1145184

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