ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Annealing behaviors of dislocation loops formed near the projected range (Rp loops) in 150 keV, 5×1015/cm2 As+- implanted (001)Si have been studied by both planview and cross-sectional transmission electron microscopy and Rutherford backscattering spectrometry. Factors influencing the formation and growth of the Rp loops, such as annealing temperature and time, as well as single- and two-step annealings have been investigated. The Rp loops were observed in samples annealed at 550–900 °C for 0.5 h. The loops were also found in samples annealed at 800 °C for a time as short as 1 s and as long as 8 h. However, they were not seen in samples annealed at 470 °C for 4 h, 500 °C for 2 h, or 550 °C for 15 min. The annealing behaviors of Rp loops in single- and two-step annealed samples and in samples with an oxide capping layer were found to be consistent with the suggestion that their formation is related to the agglomeration of self-interstitials mediated by the presence of a high concentration of electrically inactive arsenic atoms.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.346201
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