ISSN:
1432-0630
Keywords:
68
;
81
;
29
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract A computer program has been developed by which the depth concentration distribution of a two-element bulk sample can be determined from elastic backscattering data. The presented calculative procedure can be applied to non-homogeneous high concentrations, where the composition variation as a function of depth has to be considered to obtain correct distributions. Two samples with different compositions, nitrogen in titanium and gold in silicon, were analysed with 2MeVH+ and He+ ions, respectively, to illustrate the versatility of the calculative program.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00617779
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