ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
Micro electromechanical systems (MEMS) are finding uses in an increasing number ofdiverse applications. Currently the fabrication techniques used to produce such MEMS devices areprimarily based on 2-D processing of thin films. The challenges faced by producing more complexstructures (e.g. high aspect ratio, spans, and multi-material structures) require the development ofnew processing techniques.Potential solutions to these challenges based on low temperature processing of functional ceramics,selective chemical patterning, and micro-moulding are presented to show that it is possible to createcomplex functional ceramic structures which incorporate non-ceramic conducting and supportstructures. The capabilities of both techniques are compared and the relative advantages of eachexplored
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.45.2440.pdf
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