Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
69 (1991), S. 7904-7906
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
InGaAsSb alloys were grown within the solid-phase miscibility gap, lattice matched to InP (100) substrates, using ion-assisted deposition. The alloy structure and properties were strongly dependent upon the energy E of Ar ions bombarding the growing film. Films deposited with E≤16 eV exhibited multiple (400) x-ray diffraction peaks and relatively low electron mobilities, indicating that there was significant alloy decomposition. Increasing E to 19–21 eV yielded single, sharp (400) x-ray peaks and increased the electron mobility, showing that ion irradiation suppressed decomposition. E(approximately-greater-than)22 eV resulted in ion damage as indicated by decreased mobilities and broadening of the x-ray peaks.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.347477
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