ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
This note describes an improved anodization apparatus that provides enhanced safety and efficiency, and is suitable for large-scale volume production. The improved anodization apparatus also provides increased electrolyte temperature control, and allows flexibility in the size and shape of the substrate. Overall, this equipment will find wide applications in the fabrication of template-based semiconductor nanostructures, porous silicon, and other devices that require electrochemical processing. © 2001 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1326924
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