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  • 1
    Electronic Resource
    Electronic Resource
    Measurements of the cathode sheath in a magnetron sputtering discharge using laser induced fluorescence (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 3664-3667 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Magnetron discharges are widely used as sputtering sources for thin film deposition. Despite the importance of the sheath region where the electric field can be very high, there have been few experimental investigations of this region in magnetron plasmas. We report values of the sheath thickness deduced from measurements of the electric field distribution using laser spectroscopy. With this technique, a transition which is normally forbidden becomes in the presence of an electric field partially allowed so that laser induced fluorescence on this transition can be used as a measure of the electric field. It was found that the sheath thickness was approximately equal to the maximum displacement, in the absence of collisions, of a secondary electron from the cathode surface.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.352925
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  • 2
    Electronic Resource
    Electronic Resource
    Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 2732-2738 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Electron temperature Te and density ne in the source region of an electron cyclotron resonance discharge have been measured by incoherent Thomson scattering of the beam from a 0.5 J yttrium aluminum garnet laser. This is the first experiment in which this technique, routinely used on fusion plasmas, has been applied to a processing plasma. Measurements were made in an argon discharge at pressures from 0.3 to 2 mTorr and microwave powers from 250 to 1000 W. Velocity distributions were measured both parallel and perpendicular to the magnetic field and a slight anisotropy of electron temperature was observed for low-pressure discharges. Temperatures in the range of 1–5 eV and densities in the range of 2–10×1017 m−3 were measured. Te and ne were found to strongly depend on pressure but only weakly on the input power and discharge magnetic field. No deviations from a Maxwellian velocity distribution were observed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.353046
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  • 3
    Electronic Resource
    Electronic Resource
    Investigation of electron density and velocity distribution in high-pressure discharges for excimer laser pumping using laser Thomson scattering (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 70 (1991), S. 41-45 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Thomson scattering from plasmas in high-pressure discharges for rare-gas halide excimer laser pumping was observed using an yttrium-aluminum-garnet laser with a second harmonic generator, combined with a double-monochromator to reject large signal from Rayleigh scattering. The results showed the electron velocity distribution to be Maxwellian which was different from prediction of computer simulations, while variation of electron density and temperature with time and gas composition was consistent with results of computer simulations.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.350292
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  • 4
    Electronic Resource
    Electronic Resource
    Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 90 (2001), S. 2158-2161 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Measurements of the electron energy distribution function (eedf) of a low-pressure inductively coupled plasma operated in a mixture of Ar and CF4 are reported. The measurement method was laser Thomson scattering. Extensive test were performed in order to verify that any perturbations caused by the laser did not affect the measurements. The eedf was measured for different concentrations of CF4 gas, and the results indicated that it was non-Maxwellian when even small amounts of CF4 gas were present. This dependence was attributed partially to the effect of electron-molecule vibrational excitation collisions. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1398775
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  • 5
    Electronic Resource
    Electronic Resource
    ITER physics program and implications for plasma measurements (abstract) : Proceedings of the eleventh topical conference on high temperature plasma diagnostics (1997)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 68 (1997), S. 887-887 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Key objectives of the first ten years of ITER operation are the investigation of the physics of burning plasmas and the demonstration of long-pulse ignited plasma technologies. These include studies of plasma confinement and stability, divertor operation, disruption mitigation and control, noninductive current drive, and steady state operation under conditions when the plasma is heated predominantly by alpha particles. The ITER operational plan envisages two and a half years for commissioning and initial operation with hydrogen plasmas at up to 100 MW of auxiliary heating power when initial tests of divertor operation and evaluation of disruption effects will be made. In order to meet the operational and programmatic goals, it will be necessary to make a wide range of plasma measurements. In this article the preliminary operational plan and physics program are presented and the implications for plasma measurements are outlined. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1147712
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  • 6
    Electronic Resource
    Electronic Resource
    Spatial distributions of electron temperature and density in electron cyclotron resonance discharges (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 81 (1997), S. 2105-2113 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Spatial profiles of electron density and temperature of electron cyclotron resonance discharge plasmas have been successfully measured using laser Thomson scattering. The results, thus obtained, were valuable for quantitative comparison with results of a computer simulation. Measurements were performed for two cases with different locations of the electron cyclotron resonance zones. Simulation results obtained from a hybrid code, which treats ions and neutral particles as discrete particles and electrons as a fluid, were fitted to the experimental profiles of the electron density and temperature by adjusting the microwave power deposition profiles. From these comparisons and an analysis of other simulation data, it was found that the large difference of radial electron density profiles for two discharge conditions was caused by the difference of radial space-charge electric-field distributions. The radial electron temperature distribution determined the radial electric field that drove the ions radially and also resulted in a peaked electron density profile for one case and a more uniform profile for the other case. It is also shown that Coulomb collisions of electrons with ions as well as electron–neutral collisions are important for the analysis of electron behavior along the magnetic field lines. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.364262
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  • 7
    Electronic Resource
    Electronic Resource
    Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence (1991)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 58 (1991), S. 2564-2566 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The thermalization of sputtered atoms in a magnetron discharge was investigated using laser-induced fluorescence. The results clearly indicated for the first time that the velocity distribution agrees well with the Thompson formula [M. W. Thompson, Philos. Mag. 18, 377 (1968)] for d/λ(very-much-less-than)1, while a thermalized component becomes appreciable for d/λ(approximately-greater-than)1, where d is the distance from the cathode surface and λ is the mean free path of sputtered atoms for collisions with filling gas atoms.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.104827
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  • 8
    Electronic Resource
    Electronic Resource
    A study of ion velocity distribution functions in processing plasmas produced by electron cyclotron resonance discharges (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 82 (1997), S. 1036-1041 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Ion velocity distribution functions were measured using Doppler-shifted laser-induced fluorescence spectroscopy in an electron cyclotron resonance discharge in argon. The influence of the magnetic field configuration on the distributions was studied by making measurements with different magnetic field configurations. Results of a two-dimensional hybrid model of the discharge were used to help interpret the measured data. The results from the experiment and the simulation indicated that the magnetic field configuration had a strong influence on the ion velocity distribution functions. From the simulation it was concluded that the magnetic field configuration determined the axial distributions of plasma potential and electron density, and how these plasma parameters determined the ion velocity distribution function in the downstream region of the discharge.© 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.365868
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  • 9
    Electronic Resource
    Electronic Resource
    A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering (1998)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 83 (1998), S. 1909-1916 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The electron energy distribution function (eedf) in an inductively coupled plasma was studied using the method of laser Thomson scattering. eedfs were measured for various plasma conditions, at different gas pressures, and at different input rf powers. In high electron density plasmas, the eedf was observed to be Maxwellian, while in low electron density plasmas, a non-Maxwellian eedf was observed. The transition between Maxwellian and non-Maxwellian eedfs was attributed to the thermalization of the electron population in higher density plasmas. In order to completely characterize the eedf, spatial and temporal dependencies were measured and measurements were also made in the afterglow period of a pulsed discharge. Discussions are made of the electron behavior and the shape of the eedf. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.366915
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  • 10
    Electronic Resource
    Electronic Resource
    Effect of preoxidation on deposition of thin gate-quality silicon oxide film at low temperature by using a sputter-type electron cyclotron resonance plasma (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 82 (1997), S. 5680-5685 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have studied a method of combining preoxidation and subsequent sputter deposition for fabricating Si oxide films with a thickness of less than 10 nm at low temperature by using a sputter-type electron cyclotron resonance plasma system. As a key process to achieving high quality composite oxide structures, plasma preoxidation was investigated under different gas flow rates at a substrate temperature of 130 °C. The optimum conditions for the preoxidation were clarified. The structural properties of Si oxide formed by this method with the preoxidation were characterized and compared with those of Si oxide which was directly sputtered without a preoxidation step. It was found that the method with the preoxidation provided a useful way of establishing an abrupt Si/SiO2 interface region and achieving films which have a lower network disorder degree. This procedure was then followed by a thermal annealing in Ar ambient at 450 °C. A thin Si oxide film was produced with a fixed charge density of less than 1.0×1011 cm−2. 98% of the detected samples had a breakdown field of greater than 8 MV/cm. These properties essentially match the electrical quality of thermally grown Si oxide. In contrast, the oxide film deposited without a preoxidation step showed much poorer electrical properties as only 28% of the samples had a breakdown field of greater than 8 MV/cm. Also, the film showed a higher fixed charge density of 1.0×1012 cm−2. The effects of the preoxide on structural and electrical properties of deposited oxide films are discussed in detail. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.366431
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