ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A simple, flexible, and relatively inexpensive microcomputer-controlled shutter system intended, principally, for use with molecular-beam epitaxial reactors is described. Eight pneumatic shutters, each one controlling the molecular-beam emission of a corresponding effusion cell, can be operated in any combination simultaneously or sequentially. Such a system has been built and is being used to grow heterojunction and superlattice structures of binary and ternary III-V alloys.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1139707
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