Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
61 (1987), S. 3055-3060
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Coherent anti-Stokes Raman spectroscopy (CARS), laser-induced fluorescence (LIF), and emission spectroscopy are employed for the diagnostics of radio-frequency discharge plasmas of silane and germane; CARS signal of germane molecule; and LIF signal and ultraviolet emission signal of germanium atom in discharges, as well as signals from nongermanium-related neutral species are measured. The effect of hydrogen dilution on emission signal intensities in the steady-state discharge explains dynamic behaviors of the emission and CARS signal intensities in the closed discharge; these spectroscopic techniques are powerful diagnostic tools for gas-phase processes using mixed gas sources.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.337857
Permalink
Library |
Location |
Call Number |
Volume/Issue/Year |
Availability |