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  • 1
    Digitale Medien
    Digitale Medien
    Spatial distributions of electron temperature and density in electron cyclotron resonance discharges (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 81 (1997), S. 2105-2113 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Spatial profiles of electron density and temperature of electron cyclotron resonance discharge plasmas have been successfully measured using laser Thomson scattering. The results, thus obtained, were valuable for quantitative comparison with results of a computer simulation. Measurements were performed for two cases with different locations of the electron cyclotron resonance zones. Simulation results obtained from a hybrid code, which treats ions and neutral particles as discrete particles and electrons as a fluid, were fitted to the experimental profiles of the electron density and temperature by adjusting the microwave power deposition profiles. From these comparisons and an analysis of other simulation data, it was found that the large difference of radial electron density profiles for two discharge conditions was caused by the difference of radial space-charge electric-field distributions. The radial electron temperature distribution determined the radial electric field that drove the ions radially and also resulted in a peaked electron density profile for one case and a more uniform profile for the other case. It is also shown that Coulomb collisions of electrons with ions as well as electron–neutral collisions are important for the analysis of electron behavior along the magnetic field lines. © 1997 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.364262
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  • 2
    Digitale Medien
    Digitale Medien
    Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 90 (2001), S. 2158-2161 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Measurements of the electron energy distribution function (eedf) of a low-pressure inductively coupled plasma operated in a mixture of Ar and CF4 are reported. The measurement method was laser Thomson scattering. Extensive test were performed in order to verify that any perturbations caused by the laser did not affect the measurements. The eedf was measured for different concentrations of CF4 gas, and the results indicated that it was non-Maxwellian when even small amounts of CF4 gas were present. This dependence was attributed partially to the effect of electron-molecule vibrational excitation collisions. © 2001 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1398775
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  • 3
    Digitale Medien
    Digitale Medien
    Development of 180 GHz heterodyne radiometer for electron cyclotron emission measurements in JT-60U : Proceedings of the tenth topical conference on high temperature plasma diagnostics (1995)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 66 (1995), S. 413-415 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: A 12-channel heterodyne radiometer system has been developed to obtain electron temperature with high time and spatial resolution from the electron cyclotron emission (ECE) in JT-60U. Resolutions of a single-sideband-type receiver are (1) Δt∼1 μs and (2) Δf=0.5 GHz. The second harmonic extraordinary mode of ECE is utilized for this system and the frequency band is 176–188 GHz. The noise level of the system is determined by unavoidable photon fluctuations, and the signal-to-noise ratio was measured to be about 50 with a video bandwidth of 100 kHz for a signal temperature above ∼200 eV. Details of the design, the obtained performance, and typical measurements are described. © 1995 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1146364
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  • 4
    Digitale Medien
    Digitale Medien
    Highly oriented lead zirconium titanate thin films: Growth, control of texture, and its effect on dielectric properties (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 90 (2001), S. 2703-2710 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Highly oriented lead–zirconium–titanate (PZT) thin films have been grown by reactive rf-magnetron sputtering using multielemental metallic targets. The effects of deposition parameters on the film composition and texture evolution have been established. The partial pressure of oxygen (O2) and the heating rates during postdeposition anneal have been identified as critical parameters for the growth of highly oriented (111) and (100) PZT films. In order to control the growth of (111) and (100) orientation it was important to understand the interplay between these two parameters. Texture evolution mechanisms for the growth of oriented films have been proposed based on the effect of O2/argon flow and heating rates on the crystallization kinetics. The effects of crystal orientation on the dielectric and ferroelectric properties of PZT films have also been investigated. © 2001 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1385580
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  • 5
    Digitale Medien
    Digitale Medien
    Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 2732-2738 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Electron temperature Te and density ne in the source region of an electron cyclotron resonance discharge have been measured by incoherent Thomson scattering of the beam from a 0.5 J yttrium aluminum garnet laser. This is the first experiment in which this technique, routinely used on fusion plasmas, has been applied to a processing plasma. Measurements were made in an argon discharge at pressures from 0.3 to 2 mTorr and microwave powers from 250 to 1000 W. Velocity distributions were measured both parallel and perpendicular to the magnetic field and a slight anisotropy of electron temperature was observed for low-pressure discharges. Temperatures in the range of 1–5 eV and densities in the range of 2–10×1017 m−3 were measured. Te and ne were found to strongly depend on pressure but only weakly on the input power and discharge magnetic field. No deviations from a Maxwellian velocity distribution were observed.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.353046
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  • 6
    Digitale Medien
    Digitale Medien
    Investigation of electron density and velocity distribution in high-pressure discharges for excimer laser pumping using laser Thomson scattering (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 70 (1991), S. 41-45 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Thomson scattering from plasmas in high-pressure discharges for rare-gas halide excimer laser pumping was observed using an yttrium-aluminum-garnet laser with a second harmonic generator, combined with a double-monochromator to reject large signal from Rayleigh scattering. The results showed the electron velocity distribution to be Maxwellian which was different from prediction of computer simulations, while variation of electron density and temperature with time and gas composition was consistent with results of computer simulations.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.350292
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  • 7
    Digitale Medien
    Digitale Medien
    Optical study on domain switching of ferroelectric triglycine sulfuric acid and Rochelle salt (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 69 (1991), S. 409-413 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The domain switching of ferroelectric triglycine sulfuric acid and Rochelle salt was studied by observing optical gyration along the ferroelectric axes and measuring rotation of the indicatrices around the same axes. It was established experimentally that the antipolar domains of triglycine sulfuric acid were united by a symmetric twin mechanism and those of Rochelle salt by a hemitrope (rotation twin). It was shown that the high-accuracy universal polarimeter method can become a new general method for distinguishing the twinning mechanism of the ferroelectric domains.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.347731
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  • 8
    Digitale Medien
    Digitale Medien
    A study of ion velocity distribution functions in processing plasmas produced by electron cyclotron resonance discharges (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 82 (1997), S. 1036-1041 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Ion velocity distribution functions were measured using Doppler-shifted laser-induced fluorescence spectroscopy in an electron cyclotron resonance discharge in argon. The influence of the magnetic field configuration on the distributions was studied by making measurements with different magnetic field configurations. Results of a two-dimensional hybrid model of the discharge were used to help interpret the measured data. The results from the experiment and the simulation indicated that the magnetic field configuration had a strong influence on the ion velocity distribution functions. From the simulation it was concluded that the magnetic field configuration determined the axial distributions of plasma potential and electron density, and how these plasma parameters determined the ion velocity distribution function in the downstream region of the discharge.© 1997 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.365868
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  • 9
    Digitale Medien
    Digitale Medien
    A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering (1998)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 83 (1998), S. 1909-1916 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The electron energy distribution function (eedf) in an inductively coupled plasma was studied using the method of laser Thomson scattering. eedfs were measured for various plasma conditions, at different gas pressures, and at different input rf powers. In high electron density plasmas, the eedf was observed to be Maxwellian, while in low electron density plasmas, a non-Maxwellian eedf was observed. The transition between Maxwellian and non-Maxwellian eedfs was attributed to the thermalization of the electron population in higher density plasmas. In order to completely characterize the eedf, spatial and temporal dependencies were measured and measurements were also made in the afterglow period of a pulsed discharge. Discussions are made of the electron behavior and the shape of the eedf. © 1998 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.366915
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  • 10
    Digitale Medien
    Digitale Medien
    Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering (2001)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 78 (2001), S. 3187-3189 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at higher pressures. These measurements provide independent confirmation of probe measurements made in similar discharges. The electron temperature and density of the cold group of electrons were measured with an accuracy of better than 10%. © 2001 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1363695
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